At the “2022 Display General Workshop” held at Pyeongchang Phoenix Park from November 9 to 11, 2022, H&iruja presented a research project on the development of an ultra-low damage cluster sputter system for mass-production of small and medium-sized OLEDs for 8.5th generation substrates.
H&iruja said, “It is important to improve yield and increase productivity using large substrates due to the enlargement of the panel size of mobile devices and the expansion of application of OLED panels to IT devices such as notebooks, tablet PCs, and monitors.” Therefore, it is necessary to develop a cluster sputter that is advantageous for ultra-clean and low-damage.”
The task consists of the development of core parts in detail 1 and 2 and the development of equipment systems in detail 3. H&iruja supervises the development of 8.5 generation cluster sputter with ultra-clean and low-damage of 3 parts among them, and Samsung Display verifies the equipment performance of demand companies.
H&iruja said, “In 2021, the first year, the configuration of the 8.5 generation vacuum system was determined and the simulation to secure thin film uniformity and verification of the base technology were completed. In the second year, 2022, we are in the process of verifying unit technology through the production of a chamber for evaluating the cathode for the 8.5 generation and a test kit, and we are in the process of optimizing through temperature, plasma simulation, and thin film analysis.” And also announced, “In the future, we plan to develop 8.5-generation sputter equipment and secure sputter performance and reliability as tasks.”
Lastly, “If the development of large-area cluster sputter is completed while the global high-resolution small and medium-sized OLED market is expected to expand, it is possible to secure Korea’s unique display competitiveness. By solving the research task, we can build a solid SCM that leads to companies that demand materials, modules, equipment, and panels, and secure the stability of supply and demand for high-quality parts and equipment,” he concluded his presentation.